1006   Execution Error: Cooling water (IF) flow rate is too low.

The designated command cannot be executed because the cooling water flow rate (RF/WC/IF) is below the limit.

Check cooling water flow rate (RF/WC/IF) for the following possible issues:

• The power of the cooling water supply is not switched ON.
• The valve of either the ICP-MSICP-QQQ or the cooling water supply is closed.
• The cooling water strainer is clogged.
• The cooling water is insufficient (possibility of a water leak).
• The tubing in the ICP-MSICP-QQQ is clogged and the electromagnetic valve is defective.
• Either the flow rate sensor or the Connection PCA is out of order.