1113   Error: Vacuum pressure (BK) is too high to keep the Ion gauge (AN) on.

The Ion gauge cannot be turned ON because the vacuum pressure (IF/BK) exceeds the limit or the Ion gauge was turned OFF because the vacuum pressure increased abnormally (In Analysis Mode).

Check the vacuum pressure (IF/BK) for the following possible issues.

• The vent valve is not closed or the seal is incomplete.
• The cover of the vacuum chamber is not closed or the seal is incomplete.
• The power of the foreline pump is not connected or the breaker is OFF.
• The foreline pump oil level is low or the oil is dirty.
• There is a leak in the gate valve.
• The vacuum tubing has failed (the tubing is off, or a leak is caused by an incomplete seal such as a pin hole or a defective O-ring).
• There is a fault in the Pirani gauge (IF/BK) or the Connection PCA.