1123   Error: Vacuum pressure (AN) time out. Vacuum too high to enter Standby mode.

The instrument cannot transit to Standby mode because the vacuum pressure (AN) is not below the limit within the prescribed time (When the instrument is changing from Shutdown mode to Standby mode).

Check the pressure of the analyzer chamber for the following possible issues. Also this error is generated when a vacuum pump is not used for a long time. In this case, turn on the vacuum ON again.

• The vent valve is not closed or the seal is incomplete.
• The cover of the vacuum chamber is not closed or the seal is incomplete.
• The power of the foreline pump is not connected or the breaker is OFF.
• The foreline pump oil level is low or the oil is dirty.
• There is a leak in the gate valve.
• The vacuum tubing has failed (the tubing is off, or a leak is caused by an incomplete seal such as a pin hole or a defective O-ring).
• The vacuum pressure (AN) cannot be measured correctly due to a fault in the Ion gauge.
• There is a fault in the turbomolecular pump.
• Some of the parts in the vacuum chamber are not completely dry.