1127 Error: Vacuum pressure (AN) is too high to stay in Standby mode.
Standby mode cannot be maintained because the vacuum pressure (AN) exceeds the limit or the vacuum pressure (AN) rose abnormally (In Standby mode).
Check the pressure of the analyzer chamber for the following possible issues.
- The vent valve is not closed or the seal is incomplete.
- The cover of the vacuum chamber is not closed or the seal is incomplete.
- The power of the foreline pump is not connected or the breaker is OFF.
- The foreline pump oil level is low or the oil is dirty.
- The vacuum tubing has failed (the tubing is off, or a leak is caused by an incomplete seal such as a pin hole or a defective O-ring).
- There is a leak in the gate valve.
- The vacuum pressure (AN) cannot be measured correctly due to a fault in the Ion gauge.
- There is a fault in the turbomolecular pump.