1129 Error: Vacuum pressure (AN) is too high to stay in Analysis mode.
Analysis Mode cannot be maintained because the vacuum pressure (AN) is below the limit or the vacuum pressure (AN) increased abnormally (In Analysis Mode).
Check the pressure of the analyzer chamber and the interface line for the following possible issues.
- The diameter of the hole in the sampling cone is too big.
- The seal of the sampling cone is incomplete (Defective gasket).
- The plasma is too far from the sampling cone.
- The diameter of the hole in the skimmer cone is too big.
- Installation of the skimmer cone and skimmer base is incomplete.
- Installation of the Plate Bias lens is incomplete.
- The power of the foreline pump is not connected or the breaker is OFF.
- The foreline pump oil level is low or the oil is dirty.
- The vacuum tubing has failed (the tubing is off, or a leak is caused by an incomplete seal such as a pin hole or a defective O-ring).
- The vacuum pressure (AN) cannot measure correctly due to the failure of the Ion gauge.
- A drop of water was introduced into the vacuum chamber.