1133   Error: Turbo pump (A) not at target speed.

The number of revolutions of the turbomolecular pump went below the limit (When the instrument is changing from Shutdown mode to Standby mode).

Check the number of revolutions and the current of the turbomolecular pump, vacuum pressure (AN), vacuum pressure (IF/BK), and power voltage for the following possible issues.

• An increase in the vacuum pressure.
• The connector of the turbomolecular pump came off.
• Faulty turbomolecular pump power.
• Faulty turbomolecular pump or turbomolecular pump controller.
• There is a fault in the Connection PCA.