1143   Error: Turbo pump not at target speed in Analysis mode.

The number of revolutions of the turbomolecular pump went below the limit (In Analysis Mode).

Check the number of revolutions and the current of the turbomolecular pump, vacuum pressure (AN), vacuum pressure (IF/BK), and power supply voltage. The following are the probable causes.

• An increase in the vacuum pressure.
• The connector of the turbomolecular pump came off.
• Fault of the power supply (24 volt).
• Fault of the turbomolecular pump or the turbomolecular pump controller.
• There is a fault in the Connection PCA.