1202 Error: RF reflected power time out. Reflected power did not drop below pre match limit.
The Plasma RF reflected power does not go below the limit (When the instrument is changing from Standby mode to Analysis Mode).
Check the Plasma RF reflected power. The following are the probable causes.
- The installation of the torch, bonnet, and shield plate is faulty.
- The limits of the tuning parameters for RF Matching are inappropriate.
- The limits of the system parameters for the Shunt capacitor item is inappropriate.
- The Plasma RF cable came off or the cables are defective.
- Malfunction of Shunt capacitor.
The power control parameter of RF generator is not up to date. Use the script to update the power control parameter. Refer service note 7700-042 for more detail.