After the purge, the number of revolutions of the turbomolecular pump did not go below the limit within the prescribed time. The power of the turbomolecular pump was forcibly switched OFF (When the instrument is changing from Standby mode to Shutdown mode).
Check the number of revolutions and the current of the turbomolecular pump. After detecting this error, the display of the number of revolutions and the current of the turbomolecular pump will be incorrect. To check the number of revolutions and the current, start from Standby mode again.
After the purge, if the number of revolutions of the turbomolecular pump does not go down, the following are the probable causes.