1214   Error: RF amp FET over temperature.

Output FET temperature exceeds the limit.

Check Plasma RF amp temperature, Plasma RF cooling water flow rate, Plasma RF forward power, reflected power, Argon gas line pressure and flow rate. The following are the probable causes.

• A shortage of the cooling water flow rate, thus, increasing the temperature of the cooling water.
• Air is mixed with Argon gas.
• The limits of the tuning parameters for the RF Matching are inappropriate.
• The limits of the system parameters for Shunt capacitor item is inappropriate.
• The Plasma RF cable came off or the cables are defective.
• Malfunction of the Shunt capacitor, faulty Matching network.
• The installation of the RF generator output FET is faulty (the conducive heat compound is degraded).
• Faulty RF generator.