1220   Error: Plasma was shutoff during Analysis (Vacuum).

The plasma has extinguished (In Analysis Mode or during Maintenance).

Check the Argon gas line pressure and flow rate. The following are the probable causes.

• The installation of the torch, bonnet, and shield plate is faulty.
• The Argon gas is not supplied or there is a leak in the gas line.
• Air is mixed with Argon gas.
• The limits of the tuning parameters for the RF Matching are inappropriate.
• The Plasma RF cable came off or the cables are defective.
• Malfunction of the Shunt capacitor.
• Power cable to the RF generator came off.
• Faulty RF generator.
• Faulty DC power supply.