1302   Error: +600V power supply voltage is too low.

The voltage of the DC/DC converter (+600V) of the QP driver unit went below the limit.

Check the QP driver +600V power voltage. The following are the probable causes.

(NOTE: To restart, turn OFF the plasma once.)

• 48V is not supplied (Cover is open).
• QP-related cabling came off.
• QP rod, or QP-related wiring (including the vacuum chamber) causes a short in other metallic parts.
• Either the QP power board or QP driver board is faulty.