1309   Error: OctPole control malfunction.

The RF voltage of the Octopole cannot be controlled.

Check the RF voltage of the Octopole. The following are the probable causes.

• 48V is not supplied (Cover is open).
• Octopole rod or reaction cell-related wiring (including the vacuum chamber) causes a short in other metallic parts.
• Octopole matching frequency is not appropriate.
• Fault of the ORS cell driver PCA.