2153   Warning: Analyzer Vacuum is too high.

The vacuum pressure (AN) exceeds the limit (In Standby mode).

Check the vacuum pressure (AN) for the following possible issues:

• The power of the foreline pump is not connected or the breaker is OFF.
• The foreline pump oil level is low or the oil is dirty.
• The vacuum tubing has failed (the tubing is off, or a leak is caused by an incomplete seal such as a pin hole or a defective O-ring).
• The vent valve is not closed or the seal is incomplete.
• The cover of the vacuum chamber is not closed or the seal is incomplete.
• There is a leak in the gate valve.
• There is a fault in the Ion gauge or the Connection PCA.