1210   Error: RF amp FET drain current is too high.

The output of the FET drain current of the Plasma RF amps exceed the limit.

Check the Plasma RF amp output FET drain current, the Plasma RF forward power, the reflected power, the Argon gas line pressure, and flow rate. When the Plasma RF reflected power is high, reduce the reflected power by using the automatic adjustment  ([Advanced] - [Auto RF Matching] on the Tune Modes Pane context menu). The following are the probable causes.

• The installation of torch, bonnet, and shield plate is faulty.
• The Argon gas is not supplied or there is a leak in the gas line.
• Air is mixed with Argon gas.
• The limits of the tuning parameters for the RF Matching are inappropriate.
• The limits of the system parameters for the Shunt capacitor item is inappropriate.
• The Plasma RF cable came off or the cables are defective.
• Malfunction of the Shunt capacitor, faulty Matching network.
• Faulty RF generator.