1215   Error: RF amp FET drain voltage is too high.

The output of the FET drain voltage of the Plasma RF amps exceed the limit.

When the Plasma RF reflected power is high, reduce the reflected power by using the automatic adjustment ([Advanced] - [Auto RF Matching] on the Tune Modes Pane context menu).

Check the output of the FET drain voltage of the Plasma RF amp, Plasma RF forward power, reflected power, Argon gas line pressure, and flow rate. The following causes are inferred.

• Poor connection of the RF amp directional coupler (connector comes off).
• The installation of the torch, bonnet, and shield plate is faulty.
• The Argon gas is not supplied or there is a leak in the gas line.
• The air or N2 is mixed with Argon gas.
• The limits of the tuning parameters for the RF Matching are inappropriate.
• The limits of the system parameters for the Shunt capacitor item is inappropriate.
• The Plasma RF cable came off or the cables are defective.
• The malfunction of the Shunt capacitor, faulty Matching network.
• Faulty Plasma RF generator.