Cell Maintenance Pane

This section describes the functions in the Cell Maintenance Pane.

MaintenanceCellPane.png 

Toolbar

Task Settings Toolbar

MaintenanceCellPaneTool.png 

Drag MoveBar.png to move the toolbar.

OpenBypassValveIcon.png If this item is selected, the bypass valve of the cell opens. If not selected, the valve closes. Used to purge the cell-gas line.

OctPoleMatchingIcon.png Automatically adjusts the octopole matching. Close the right and left hoods before you start the adjustment. Perform the adjustment when replacement or maintenance of the octopole is performed.

Setup Table

Set the flow rate of each type of gas to perform the purging and vacuuming in the cell gas line.

 

If ammonia gas is used as the third cell gas, He gas is automatically turned on with the ammonia gas for safety.

 

[Parameter]

Displays the parameters. For details on each parameter, refer to the [Cell] Table in the Tune Modes Pane.

[Output] Column

Adjusts the flow rate of each gas.

[Input] Column

Displays the current values.

[Unit] Column

Displays the unit.

Context Menu

This section describes the commands that are available in the context menu, which is displayed when you right-click in the pane. The commands that are not listed below have the same function as their counterparts on the toolbars.

[Export Table]

Opens the [Export Table] (Entire Table) dialog box, which lets you export the entire table. This command is available when a pane that includes a table is selected.

[Print]

Opens the [Print] dialog box, which lets you print the contents of the selected pane.

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