Troubleshooting

If you aren't sure where to start to fix the issue, try the troubleshooting overview. It provides some tips to help you identify and resolve the issue.

Warning Messages

• #2100
  • 2150   Warning: Interface Vacuum is too low.
  • 2151   Warning: Interface Vacuum is too high.
  • 2152   Warning: Analyzer Vacuum is too high.
  • 2153   Warning: Analyzer Vacuum is too high.
• #2300
  • 2300   Warning: QP pickup temperature control malfunction.
  • 2350   Warning: QP1 pickup temperature control malfunction.
• #2400
  • 2400   Warning: Cooling water (IF) flow rate is low.
  • 2403   Warning: Cooling water temperature is high.
  • 2404   Warning: Cooling water temperature is low.
  • 2404   Warning: Cooling water temperature is low.
  • 2412   Warning: Plasma gas flow rate is low.
  • 2413   Warning: Aux gas flow rate is low.
  • 2414   Warning: Nebulizer gas flow rate is low.
  • 2415   Warning: Makeup gas flow rate is low.
  • 2416   Warning: Option gas flow rate is out of allowable range.
  • 2417   Warning: Option gas flow rate is out of allowable range.
  • 2418   Warning: Option gas flow rate is out of allowable range.
  • 2426   Warning: Cell Temperature is high.
  • 2433   Warning: Inlet temperature is high.
  • 2435   Warning: Inside/Inlet temperature difference is outside the warning limit.
• #2600
  • 2605   Warning: Y-axis Torch position is outside the warning limit.
  • 2606   Warning: Z-axis Torch position is outside the warning limit.
  • 2607   Warning: Y-Axis movement disabled due to partially closed top cover.
  • 2608   Warning: Torch position initialization failed.
  • 2610   Warning: Torch position has not initialized.

Error Messages

• #1000
  • 1000   Execution Error: Instrument is in transition between modes.
  • 1001   Execution Error: Instrument is busy igniting plasma.
  • 1002   Execution Error: Instrument is busy. Plasma off sequence is running.
  • 1003   Execution Error: Cannot execute command during Plasma on.
  • 1004   Execution Error: Instrument is busy updating parameters.
  • 1005   Execution Error: Instrument is now in Shutdown mode.
  • 1006   Execution Error: Cooling water (IF) flow rate is too low.
  • 1007   Execution Error: Instrument is not in Shutdown mode.
  • 1009   Execution Error: Vacuum pressure (BK) is too high.
  • 1010   Execution Error: Vacuum pressure (IF) is too high.
  • 1012   Execution Error: Cannot execute command because the Turbo pump is ON.
  • 1014   Execution Error: Cannot execute because the 24V power supply is ON.
  • 1015   Execution Error: Cannot execute while the Spray chamber control is on.
  • 1017   Execution Error: Torch position X-axis is out of range.
  • 1022   Execution Error: Cannot open bypass valve because of high cell pressure.
  • 1023   Execution Error: Instrument must be in Analysis mode for ORS mode to be turned on/off.
  • 1024   Execution Error: ORS can not be turned on/off during transition between cell modes.
  • 1025   Execution Error: Cell gas flow can only be switched on in Analysis mode.
  • 1026   Execution Error: Replace RF Generator. RF cable disconnection.
  • 1027   Execution Error: Replace RF Generator. RF cable disconnection.
  • 1029   Execution Error: Water valve sensor and/or water valve malfunction.
  • 1030   Execution Error: Instrument must be in standby mode for Cell Gas Dilution valve to be turned o/off.
  • 1040   Execution Error: Cannot turn off QP1 fan because the QP48VON is ON.
  • 1041   Execution Error: Cannot handle 4th MFC stop valve.
  • 1060   Error: ADS 2 Control board error.
  • 1061   Error: ADS 2 Solenoid valve error.
  • 1062   Error: ADS 2 Syringe pump error.
  • 1063   Error: ADS 2 Switching valve (Valve A or B ) error.
  • 1064   Error: ADS 2 Platform error.
  • 1065   Error: ADS 2 Communication error.
  • 1066   Error: ADS 2 Operation failure.
  • 1067   Error: ADS 2 Firmware mismatch error.
  • 1090   Execution Error: EPROM contents error.
  • 1091   Execution Error: Firmware boot error in Main Board. Upload Main Board firmware.
  • 1092   Execution Error: Flash ROM write error. Upload Main Board firmware.

   

• #1100
  • 1101   Error: Vacuum (BK) time out, vacuum too high to start turbo pump.
  • 1102   Error: Vacuum (BK) time out. Vacuum too high to switch on Ion gauge (AN).
  • 1103   Error: Vacuum pressure (BK) increased above turbo ON limit.
  • 1104   Error: Vacuum pressure (BK) is too high to keep the Ion gauge (AN) on.
  • 1110   Error: Pirani gauge (BK) malfunction (Open).
  • 1111   Error: Vacuum pressure (BK) is too high to keep the Ion gauge (AN) on.
  • 1112   Error: Pirani gauge (BK) malfunction (Open).
  • 1113   Error: Vacuum pressure (BK) is too high to keep the Ion gauge (AN) on.
  • 1115   Error: Vacuum pressure (BK) is too high to keep the Ion gauge (AN) on.
  • 1116   Error: Pirani gauge (BK) malfunction (Open).
  • 1118   Error: Vacuum pressure (IF) time out. Vacuum too high to open the gate valve.
  • 1119   Error: Vacuum pressure (IF) is too high to open gate valve.
  • 1120   Error: Vacuum pressure (IF) is too high to stay in Analysis mode.
  • 1122   Error: Ion gauge (AN) malfunction.
  • 1123   Error: Vacuum pressure (AN) time out. Vacuum too high to enter Standby mode.
  • 1124   Error: Vacuum pressure (AN) time out.  Vacuum is too high to enter Analysis mode.
  • 1127   Error: Vacuum pressure (AN) is too high to stay in Standby mode.
  • 1128   Error: Ion gauge (AN) meter reading is out of range in Analysis mode.
  • 1129   Error: Vacuum pressure (AN) is too high to stay in Analysis mode.
  • 1131   Error: Vacuum pressure (AN) time out. Vacuum too high after the gate valve closed.
  • 1133   Error: Turbo pump (A) not at target speed.
  • 1134   Error: Gate valve did not open.
  • 1135   Error: Malfunction on Gate valve open. Valve closed again.
  • 1139   Error: Turbo pump not at target speed in Standby mode.
  • 1141   Error: Gate valve is closed due to an error while in Analysis mode.
  • 1143   Error: Turbo pump not at target speed in Analysis mode.
  • 1147   Error: Gate valve did not close when Plasma off.
  • 1149   Error: Vacuum pressure (BK) is too high to keep the turbo on.
  • 1152   Error: Backing solenoid valve (SVBK) did not open.
  • 1153   Error: Interface solenoid valve (SVIF) did not open.
  • 1154   Error: Cannot start vacuum sequence because the gate valve is open.
  • 1155   Error: Turbo pump not at target speed (Standby -> Shutdown). Power cycle the ICP-MSICP-QQQ to
  • 1158   Error: Ion gauge meter reading out of range (Shutdown -> Standby).
  • 1159   Error: Cannot turn on Ion gauge. Backing pressure is too high.
  • 1160   Error: HV for Ion gauge is out of range (Shutdown -> Standby).
  • 1161   Error: Current of Ion gauge is out of range (Shutdown -> Standby).
  • 1162   Error: HV for Ion gauge is out of range (Standby -> Analysis).
  • 1163   Error: Current of Ion gauge is out of range (Standby -> Analysis).
  • 1164   Error: HV for Ion gauge is out of range (Analysis -> Standby).
  • 1165   Error: Current of Ion gauge is out of range (Analysis -> Standby).
  • 1166   Error: HV for Ion gauge is out of range (Standby).
  • 1166   Error: HV for Ion gauge is out of range (Standby).
  • 1167   Error: Current of Ion gauge is out of range (Standby).
  • 1168   Error: HV for Ion gauge is out of range (Analysis).
  • 1169   Error: Current of Ion gauge is out of range (Analysis).
  • 1170   Error: Turbo Pump2 not at target speed in Standby mode.
  • 1171   Error: Turbo Pump2 not at target speed in Analysis mode.
  • 1172   Error: Turbo Pump2 not at target speed in Shutdown to Standby mode.
  • 1173   Error: ORSEPC relay malfunction on the QQQ system I/O board.
  • 1174   Error: ORSEPC relay malfunction on the QQQ system I/O board.
  • 1175   Error: ORSEPC relay malfunction on the QQQ system I/O board.

   

• #1200
  • 1200   Error: Shunt capacitor time out. Did not reach target value.
  • 1202   Error: RF reflected power time out. Reflected power did not drop below pre match limit.
  • 1203   Error: Plasma did not come on.
  • 1205   Error: Turbo is not slowing (Standby -> Shutdown). Power cycle the ICP-MSICP-QQQ to reset.
  • 1206   Error: Turbo not slowing. Turbo Pump power has been switched OFF. Wait for 20 min.
  • 1210   Error: RF amp FET drain current is too high.
  • 1211   Error: RF power control malfunction.
  • 1212   Error: RF amp FET drain voltage is too high.
  • 1213   Error: RF48V power supply voltage is too low.
  • 1214   Error: RF amp FET over temperature.
  • 1215   Error: RF amp FET drain voltage is too high.
  • 1216   Error: RF power is unbalanced.
  • 1218   Error: Plasma was shutoff (Plasma RF Monitor).
  • 1219   Error: Plasma was shutoff during vacuum (IF) on.
  • 1220   Error: Plasma was shutoff during Analysis (Vacuum).
  • 1221   Error: Replace RF Generator: DCP feedback cable is open.
  • 1222   Error: Large or small top Cover opened.
  • 1223   Error: RF Drain voltage is too low.
  • 1226   Error: RF amp fan malfunction.
  • 1228   Error: Plasma was shutoff when nebulizer and makeup gas flow were started.
  • 1230   Error: Plasma was shutoff when opening gate valve.
  • 1231   Error: Plasma was shutoff after opening gate valve.
  • 1232   Error: Plasma was shutoff when loading tune parameters.
  • 1233   Error: RF Generator has switched 48V power supply off.

   

• #1300
  • 1300   Error: QP2 fan malfunction.
  • 1301   Error: QP control (Feedback circuit) malfunction.
  • 1302   Error: +600V power supply voltage is too low.
  • 1303   Error: +600V power supply voltage is too high.
  • 1304   Error: -720V power supply voltage is too low.
  • 1305   Error: -720V power supply voltage is too high.
  • 1306   Error: QP amp temperature is too high.
  • 1307   Error: Lens and EM power supply cannot be switched on.
  • 1308   Error: OctPole drain current Error.
  • 1309   Error: OctPole control malfunction.
  • 1350   Error: QP1 fan malfunction.
  • 1351   Error: QP1 control (Feedback circuit) malfunction.
  • 1352   Error: QP1 +600V power supply voltage is too low.
  • 1353   Error: QP1 +600V power supply voltage is too high.
  • 1354   Error: QP1 -720V power supply voltage is too low.
  • 1355   Error: QP1 -720V power supply voltage is too high.
  • 1356   Error: QP1 Amplifier temperature is too high.
  • 1361   Error: Axial Acceleration current level is out of range.

   

• #1400
  • 1400   Error: Cooling water (IF,RF) flow rate is too low.
  • 1402   Error: Cooling water temperature is too high.
  • 1406   Error: AVS valve did not switch as requested.
  • 1410   Error: Torch position X-axis limit SW malfunction.
  • 1411   Error: Torch position Y-axis limit SW malfunction.
  • 1413   Error: Torch position X-axis time out occurred.
  • 1414   Error: Torch position Y-axis time out occurred.
  • 1415   Error: Torch position Z-axis time out occurred.
  • 1416   Error: Torch position X-axis initialization failed.
  • 1417   Error: Torch position Y-axis initialization failed.
  • 1418   Error: Torch position Z-axis initialization failed.
  • 1422   Error: Torch position initialization time out occurred.
  • 1426   Error: Cell Temperature is too high.
  • 1427   Error: Cell Temperature Control malfunction. Temperature Control Stopped.
  • 1428   Error: Cell Temp malfunction.
  • 1429   Error: Cell Heater malfunction.
  • 1430   Error: Air intake temperature is too high.
  • 1432   Error: Inside housing temperature is too high.
  • 1433   Error: 24V power supply malfunction.
  • 1437   Error: 15V power supply malfunction.
  • 1438   Error: Replace ORS AMFC assembly. The valve for H2 gas in the AMFC assembly is not closing completely.
  • 1439   Error: Replace 3rd MFC assembly. The valve for NH3 in the Massflow assembly is not closing completely.
  • 1440   Error: Cooling water (IF) flow rate is too low. Spray chamber temperature control has been turned off.
  • 1441   Error: Spray chamber temperature (L) is too high.
  • 1442   Error: Spray chamber temperature (L) is too low.
  • 1443   Error: Spray chamber temperature control malfunction.
  • 1445   Error: Plasma gas flow rate is too low.
  • 1446   Error: Aux gas flow rate is too low.
  • 1446   Error: Aux gas flow rate is too low.
  • 1449   Error: Spray chamber temperature (H) is too high.
  • 1450   Error: Spray chamber temperature (H) is too low.
  • 1456   Error: Ar gas controller (AMFC) malfunction.
  • 1457   Error: AMFC operating parameters are out of range. Replace AMFC.
  • 1458   Error: QP BD operating parameters are out of range. Replace QP BD.
  • 1460   Error: AMFC module information does not match instrument type. Check Ar AMFC cable or replace Ar AMFC.
  • 1461   Error: ORS AMFC module information does not match instrument type. Check ORS AMFC cable or replace ORS AMFC.
  • 1466   Error: Option gas flow rate is out of acceptable range.
  • 1467   Error: Option gas flow rate is out of acceptable range.
  • 1468   Error: Option gas flow rate is out of acceptable range.
  • 1470   Error: Argon Gas Purging at Standby was canceled, because argon gas back pressure is too low. Please increase argon gas pressure and reconfigure Argon Gas Purging.
  • 1471   Error: Argon Gas Purging at Standby was canceled, because option gas back pressure is too low. Please increase option gas pressure or set flow rate to 0.0 L/min and reconfigure Argon Gas Purging.
  • 1472   Error: Argon Gas Purging at Standby was canceled, because top cover was opened. Please close top cover and reconfigure Argon Gas Purging.
  • 1473   Error: Argon Gas Purging at Standby was canceled suspended, because stopping of exhaust duct system was detected.
  • 1474   Error: Argon Gas Purging at Standby was canceled, because power failure occurred.
  • 1480   Error: Internal leakage of 4th Cell gas found. Replace 4th MFC.
  • 1498   Error: QP1 PCA operating parameters are out of range. Replace QP BD.

   

• #1500
  • 1518   Error: Main Board communication error.
  • 1519   Error: XYZ Board communication error.
  • 1520   Error: Introduction Board communication error.
  • 1521   Error: System I/O Board communication error.
  • 1522   Error: QP Controller Board communication error.
  • 1523   Error: RF Driver Board communication error.
  • 1524   Error: HV Driver Board communication error.
  • 1525   Error: OctP Driver Board communication error.
  • 1526   Error: Cell Gas Controller Board communication error.
  • 1527   Error: AVS PCA communication error.
  • 1528   Error: QP1 PCA communication Error.
  • 1529   Error: QQQ System PCA communication Error.